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Home>Product>Carbon fibre composite rigid felts (long and short)>Epitaxial Felt

Epitaxial Felt

● Designed specifically for SiC epitaxial process, unique assembly structure, high resistivity, avoids sparking
● Has good thermal insulation performance
優(yōu)點(diǎn)
Specially designed for SiC epitaxial process, unique assembly structure, high resistivity, avoid sparking
Has good thermal insulation performance

Performance Indicators

Performance Indicators Units Vulan Models
VU-LRF-PD VU-LRF-PR VU-LRF-VB VU-SRF-V VU-LRF-SPG
Density g/cm3 0.16±0.02 0.16±0.02 0.18±0.02 0.18±0.02 0.25±0.02
Carbon Content wt >99.9 >99.9 >99.9 >99.9 >99.9
Heat-Treatment Temperature ℃ 2400 2400 2400 2400 2400
Average Thermal Conductivity 1000℃ W/（m·K） 0.23 0.18 0.17 0.25 0.44
Ash Content ppm <20 <20 <20 <20 <200
Compressive
Strength 		Mpa 1.80 1.50 1.20 0.50 2.31
Bending
Strength 		Mpa 1.33 1.26 1.00 0.50 1.80
Usage
Environment 		Vacuum ℃ 2400 2400 2400 2400 2400
Inert Gas 3200 3200 3200 3200 3200
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